MeiVac’s VQ throttle valve is the best downstream pressure control valve available on the market. The unique counter-rotating vane set provides for linear control across the entire operating range of the valve. In the open position the VQ throttle valve vanes offer little restriction in the pumping path during critical pump down operations. The counter rotated vane designs allow VQ flanges to be low profile, further minimizing conductance losses and pump stack heights. If linear control and process repeatability are important, then the MeiVac VQ throttle valve is a must for your thin film process application.

Vari-Q Throttle Valve – 3500 ASA Flange

Part Number	Description
P/N: VQ-35-ASA-U-PA	3500 ASA aluminum flange, clear alodine coat, pneumatically actuated
P/N: VQ-35-ASA-H-PA	3500 ASA aluminum flange, hard anodized coat, pneumatically actuated
P/N: VQ-35-ASA-U-SM	3500 ASA aluminum flange, clear alodine coat, servomotor actuated
P/N: VQ-35-ASA-H-SM	3500 ASA aluminum flange, hard anodized coat, servomotor actuated

P/N: VQ-35-ASA-H-SM

VQ-35-ASA Dimensional Specifications

Dimension	O.D.	I.D	T	A	N	H	D	O-Ring
Inches	41.75	35.00	5.250	41.68	14	1.625	38.50	35 ID x 0.275 C/S

VQ Optional Accessories

Part Number	Description
P/N: SM-651C	Digital controller with multiple set points
P/N: SM-2153-MK	On-valve controller