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Vari-Q Throttle Valve – 10″ CF Flange

MeiVac’s VQ throttle valve is the best downstream pressure control valve available on the market. The unique counter-rotating vane set provides for linear control across the entire operating range of the valve. In the open position the VQ throttle valve vanes offer little restriction in the pumping path during critical pump down operations. The counter rotated vane designs allow VQ flanges to be low profile, further minimizing conductance losses and pump stack heights. If linear control and process repeatability are important, then the MeiVac VQ throttle valve is a must for your thin film process application.

Vari-Q Throttle Valve – 10″ CF Flange
Part Number Description
                          P/N: VQ-10-CF-SS-PA         10″ CF flange, stainless steel, pneumatically actuated
                          P/N: VQ-10-CF-SS-SM         10″ CF flange, stainless steel, servomotor actuated

VQ Throttle Valve Dimensions -luna

VQ-10-CF-SS-PA Throttle Valve

VQ Throttle Valve Actuator Dimensions

VQ-10-CF Dimensional Specifications
Dimension O.D. I.D T A N H D O-Ring
      Inches         9.97         6.438         0.970         10.35            24         0.332         9.128     Cu Gasket

VQ Optional Accessories
Part Number Description
P/N: SM-651C         Digital controller with multiple set points
       P/N: SM-2153-MK         On-valve controller

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