AQUA-LOK
Cryogenic Water Pump
Discerning customers demand better performance, using less resources for today’s product innovations. MeiVac introduces the AQUA-LOK Cryogenic Water Pump with exactly that thought in mind. Users can achieve up to 80% faster pump-down time using less energy and requiring a smaller cleanroom footprint than traditional compressor driven pumps.
AQUA-LOK
Cryogenic Water Pump
Improve your process by reducing pumpdown time and lowering base level vacuum!
e-Vap®
Evaporation Sources & Accessories
MeiVac offers a complete line of evaporation products. From miniature research sources to 400cc industrial sources. We also have a complete line of power supplies, controls and accessories. Everything you need to set up your evaporation system from one source.
MAK
Sputter Sources & Accessories
MeiVac is a leading manufacturer of planar magnetron sputter sources, offering a wide range of standard and custom sources to meet many different application requirements. We are a one-stop shop for complete sputter deposition packages
Vari-Q
Throttle Valves & Accessories
The unique counter rotating vane design of the MeiVac Vari-Q throttle valve provides for superior linear control of your process pressure. These valves are highly repeatable and have proven to be a reliable component which often times will last longer than the systems where they are installed.
HTR
Substrate Heaters & Accessories
MeiVac manufactures high-temperature resistive substrate heaters for heating samples or wafers to 950C with superior uniformity. 2 & 3″ sample heaters and 2,4,& 6″ wafer specific heaters are used for many deposition techniques.