The RX01 series RF power supply package is a complete 13.56MHz RF package, including generator, AT auto-matching network, MC-2 control panel along with all cables and interlock connectors. These packages are conservatively rated and are CE marked, making them suitable for global RF sputter deposition applications. All units have been tested with MAK sources and are tuned for plug and play operation.
| R301 – 13.56MHz -300W RF Power Package |
| Part Number |
Description |
| P/N: SU-R301 |
300W RF Power Package, CE Marked |
R301 RF Generator |
AT Auto-Match Network and MC-2 Control Panel
|
| R301 RF Generator Specifications |
| Parameter |
Specification |
| Frequency |
13.56 MHz |
| Output Power |
300 watts |
| Forward Power Metering |
+ /-1% Full Scale, +/-1% Reading |
| Output Power Stability |
+/0.5% Long Term, +/-1%Watt |
| Harmonics |
-50 dBc |
| Input Power |
95 – 125 VAC or 190 – 264 VAC, 47-63 Hz |
| Output Connector |
Type “N” Female |
| Interface Connectors |
Serial: DB-9 Female; Analog: DB-25 Female |
| Cooling |
Forced Air, 110 CFM (52 L/Sec.) |
| Dimensions |
5.25 H x 9.5 W x 19 D (in.), 13.33 x 24.13 x 48.26 (cm) |
| Weight |
27 lbs |
| MC-2 Control Panel Specifications |
| Parameter |
Specification |
| Input Power |
98 – 125 / 196 -250 VAC Selectable, 47-63 Hz |
| Dimensions |
3.5″ H x 9.5″ W x 12.9″D |
| I/O Connections |
Match (DB15F), Analog (DB25F), RS232 (DB9F), Loop-Thru (DB25/M/F) |
| AT Match Network Specifications |
| Parameter |
Specification |
| AT-3 |
300 Watts, 20 Amps @ 2.5KV pk |
| Dimensions |
5″ H x 9″ W x 15″ D |
| Cooling |
Air-Convection |
| Tuning Range |
1.5 to 35 Ohms – 100 to +75 Ohm |
| RF Conn. |
Input: Type “N” Female / Output: Type “HN” Female |
