MeiVac offers a variety of DC power supplies and RF generators to meet most sputter processing needs.
Available DC Power Supplies
PRODUCT
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PART NUMBER
(Click for more information)
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Power Mag Technology DC Power Supply
- 1000W or 1500W DC Power
- Arc suppression circuitry
- Regulate in power, voltage, or current modes
- Universal input voltage
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Advanced Energy DC Power Supplies
- Standard MDX Series DC Power
- Available in 500W/ 1KW / 1.5KW
- Available in 5KW or 10 KW
- Pulsed DC Power
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Available RF Generators
PRODUCT
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PART NUMBER
(Click for more information)
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13.56 MHz RF Generator
- 300W / 600W / 1000W
- CE Marked
- Air Cooled Rack
- RS-232 / 422 / 485
- Dual Power Range
- RF/DC Voltage Control
- Master / Slave Operation
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Automatic and Manual Tuning Networks
- Generator Forward Power, Reflected Power, and DC Bias Voltage Displayed
- Analog or RS-232 Serial Interface
- Low Losses / Wide Tuning Range
- Single Point System Integration
- Agile Frequency Tuning
- CE Marked
- Conservatively Rated
- Programmable Presets
- DC Probe Standard
- Optional Pulse Detector
- Air and Vacuum Variable Capacitors
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