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HTR Substrate Heater

MeiVac is a leading manufacturer of high-temperature resistive substrate heaters. Noted for its superior uniformity, the HTR substrate heater has been used for many R&D applications where reliability is critical. These heaters are configured for wafer specific sizes, as well as, smaller unique substrate geometries. They were designed to operate under rigorous conditions and they are both UHV and O2 compatible. They have been used in sputtering, laser ablation, ion beam deposition, ECR, MOCVD among other applications. In 2012 MeiVac developed the VTAC – Variable Temperature AC controller to provide a closed loop control package for the HTR heater stages.


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