e-Vap fixed pocket electron beam evaporation sources offer large material volume in a compact package. These sources are available in HV or UHV (VCR fitting) versions. These rugged high performance sources are perfect for a dedicated one material deposition process. These sources use the same advanced magnetic system utilized in our rotary source providing unmatched performance and reliability.
Part Number |
Description |
P/N: 0402-0004-1007 |
Single fixed pocket 7cc electron beam evaporation source |
P/N: 0402-0004-1015 |
Single fixed pocket 15cc electron beam evaporation source |
P/N: 0402-0004-1025 |
Single fixed pocket 25cc electron beam evaporation source |
P/N: 0402-0004-1040 |
Single fixed pocket 40cc electron beam evaporation source |
P/N: 0402-0004-1075 |
Single fixed pocket 75cc electron beam evaporation source |
P/N: 0402-0004-1100 |
Single fixed pocket 100cc electron beam evaporation source |
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e-Vap® Large Frame Specifications |
Parameter |
Specification |
Maximum Power 7cc to 15cc |
6kW – Crucible and material dependent |
Maximum Power 25cc to 100cc |
12kW – Crucible and material dependent |
Operating Voltage |
-6kV to -10kV |
Beam Current |
Zero to 1A |
Water Flow |
3.0 gpm @ 65 psi |
XY sweep |
0-200 Hz |
Size |
3.20″L x 5.62″W x 3.25″H |
Weight |
10 lbs |
Vacuum |
to 2x10E-8 Torr (VCR version) |
e-Vap® Large Fixed Optional Accessories |
MeiVac purchased the entire MDC e-Vap thin film product line in 2012.
Contact our support team at support@meivac.com
for parts and service on all MDC e-Vap legacy products.