e-Vap® Evaporation Sources |
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Click for Specifications
- Compact design
- Water cooled
- 2cc fixed pocket
- Fits onto a 2.75″ CF flange
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Click for Specifications
- Compact design
- Uniquely small footprint
- 2cc x 4-pocket configuration
- Water cooled
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Click for Specifications
- Modular design
- Water Cooled
- 7 to 100cc Fixed pocket
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Click for Specifications
- Modular design
- Water cooled
- 7 to 30cc x 4-pocket configuration
- 7 to 12cc x 6-pocket configuration
- 150cc carousel pocket
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Click for Specifications
- Water cooled
- 100cc x 3 pocket configuration
- 40 to 75cc x 4 pocket configuration
- 25 to 40cc x 6 pocket configuration
- 400cc carousel pocket
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Click for Design Examples
- Custom specified flange sizes
- Vertical & horizontal configurations
- Integrated electrical, water, and motion feedthroughs
- Shutter options available
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Click for Specifications
- 7 to 40cc x 4 pocket
- No in vacuum bearings
- Bakeable to 220 C
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MeiVac purchased the entire MDC e-Vap thin film product line in 2012.
Contact our support team at support@meivac.com
for parts and service on all MDC e-Vap legacy products.