e-Vap® Evaporation Sources

	e-Vap 3kW Miniature Source Click for Specifications Compact design Water cooled 2cc fixed pocket Fits onto a 2.75″ CF flange
	e-Vap 3kW Mighty Source Click for Specifications Compact design Uniquely small footprint  2cc x 4-pocket configuration Water cooled
	e-Vap 10kW Large Fixed Pocket Source Click for Specifications Modular design Water Cooled 7 to 100cc Fixed pocket
	e-Vap 10kW Large Rotary Pocket Source Click for Specifications Modular design Water cooled 7 to 30cc x 4-pocket configuration 7 to 12cc x 6-pocket configuration 150cc carousel pocket
	e-Vap XL Rotary Pocket Source Click for Specifications Water cooled 100cc x 3 pocket configuration 40 to 75cc x 4 pocket configuration 25 to 40cc x 6 pocket configuration 400cc carousel pocket
	e-Vap Custom Flangemount Assemblies Click for Design Examples Custom specified flange sizes Vertical & horizontal configurations Integrated electrical, water, and motion feedthroughs Shutter options available
	UHV Linear Source Click for Specifications 7 to 40cc x 4 pocket No in vacuum bearings Bakeable to 220 C

MeiVac purchased the entire MDC e-Vap thin film product line in 2012.
Contact our support team at support@meivac.com
for parts and service on all MDC e-Vap legacy products.