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e-Vap® 3kW Miniature Evaporation Sources

e-Vap® 3kW electron beam evaporation sources are the ideal choice for research systems. The crucible size is carefully matched to the 3kW power supply to allow temperatures high enough to evaporate virtually any materials including metals, oxides, and even refractory metals. The small footprint makes them easy to integrate into just about any chamber.

e-Vap® Miniature Fixed Frame
Part Number Description
P/N: 0414-0004-1002         Single fixed pocket 2cc electron beam evaporation source

e-Vap Miniature Source cropped


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e-Vap® Miniature Frame Specifications
Parameter Specification
                        Maximum Power         3kW – Crucible and material dependent
                        Operating Voltage         Approximate -5kV
                        Beam Current         Zero to 600mA
                        Water Flow         0.62 gpm @ 65 psi
                        Mounting         2.75″ CF flange with HV and Water feedthroughs included
                        Vacuum         UHV to 2x10E-11 Torr

e-Vap® Miniature Optional Accessory
Part Number Description
P/N: 7007-9900-0         3kW CVS Power Supply and Controller (Click for Datasheet)

MeiVac purchased the entire MDC e-Vap evaporation thin film product line in 2012. We now offer a wide array of both e-beam and resistive evaporation sources.
Contact our support team at
for parts and service on all MDC e-Vap legacy products.

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