e-Vap® 3kW electron beam evaporation sources are the ideal choice for research systems. The crucible size is carefully matched to the 3kW power supply to allow temperatures high enough to evaporate virtually any materials including metals, oxides, and even refractory metals. The small footprint makes them easy to integrate into just about any chamber.
| e-Vap® Miniature Fixed Frame |
| Part Number |
Description |
| P/N: 0414-0004-1002 |
Single fixed pocket 2cc electron beam evaporation source |
Download PDF 
| e-Vap® Miniature Frame Specifications |
| Parameter |
Specification |
| Maximum Power |
3kW – Crucible and material dependent |
| Operating Voltage |
Approximate -5kV |
| Beam Current |
Zero to 600mA |
| Water Flow |
0.62 gpm @ 65 psi |
| Mounting |
2.75″ CF flange with HV and Water feedthroughs included |
| Vacuum |
UHV to 2x10E-11 Torr |
| e-Vap® Miniature Optional Accessory |
MeiVac purchased the entire MDC e-Vap evaporation thin film product line in 2012. We now offer a wide array of both e-beam and resistive evaporation sources.
Contact our support team at support@meivac.com
for parts and service on all MDC e-Vap legacy products.
