MeiVac is a leading manufacturer of planar magnetron sputter cathodes. Noted for its simplicity, ease of use, and resulting high reliability, the MAK sputter source has been designed to present the smallest profile possible and deliver higher deposition rates than any comparable sputter sources. MeiVac thin film sputter deposition products are the right choice for your process with a full range of standard and custom configurations.
| 6.0″ MAK Sputter Source – Circular Cathode |
| Part Number |
Description |
| P/N: L600A01 |
Vertical (axial) mount sputter source |
| P/N: L600A01H |
Horizontal (rt. angle) mount sputter source |
| P/N: L600A01FM |
Flexmount (+/- 45 degree angular adjustable) sputter source |
| P/N: L600A01CF |
Flange mount sputter source |
| 6.0″ MAK Operating & Dimensional Specifications |
| Target Diameter |
Magnets |
Max Dc Power |
Max RF Power |
Cathode Voltage (v) |
Max Discharge Current |
Pressure Range (mtorr) |
Water Flow Rate |
Min CF Flange Size |
| 6.0″ (152.4mm) |
Nd/FeB |
6000W |
2000W |
200-1000 |
10.0 A |
0.5 – 600 |
2.0 gpm |
10.0″ CF |
| Dimension |
A |
B |
B’ |
C |
D |
D’ |
E |
F |
| Inches |
Ø 6.55 |
6.75 |
* |
Ø 4.50 |
12.0 |
4.50 |
Ø 1.25 |
2.30 |
| 6.0″ MAK Optional Accessories |
| Part Number |
Description |
| P/N: 7004-1500-1 |
MAXIM 1500W DC Power Supply, CE Marked |
| P/N: 7004-0500-3 |
12′ Output Cable from DC power supply to sputter source |
| P/N: SU-R601 |
600W – 13.56MHz Complete RF Power Package, CE Marked |
