Vari-Q Throttle Valve – 600 ASA Flange

MeiVac’s VQ throttle valve is the best downstream pressure control valve available on the market. The unique counter-rotating vane set provides for linear control across the entire operating range of the valve. In the open position the VQ throttle valve vanes offer little restriction in the pumping path during critical pump down operations. The counter rotated vane designs allow VQ flanges to be low profile, further minimizing conductance losses and pump stack heights. If linear control and process repeatability are important, then the MeiVac VQ throttle valve is a must for your thin film process application.

Vari-Q Throttle Valve – 600 ASA Flange
Part Number Description
                          P/N: VQ-6-ASA-U-PA         600 ASA aluminum flange, clear alodine coat, pneumatically actuated
                          P/N: VQ-6-ASA-H-PA         600 ASA aluminum flange, hard anodized coat, pneumatically actuated
                          P/N: VQ-6-ASA-SS-PA         600 ASA stainless steel flange, pneumatically actuated
                          P/N: VQ-6-ASA-U-SM         600 ASA aluminum flange, clear alodine coat, servomotor actuated
                          P/N: VQ-6-ASA-H-SM         600 ASA aluminum flange, hard anodized coat, servomotor actuated
                          P/N: VQ-6-ASA-SS-SM         600 ASA stainless steel flange,servomotor actuated


VQ Throttle Valve Dimensions -luna

Throttle valve VQ10
P/N: VQ-10-ASA-H-SM

VQ Throttle Valve Actuator Dimensions


VQ-6-ASA Dimensional Specifications
Dimension O.D. I.D T A N H D O-Ring
      Inches         11.00         7.376         2.375         10.89             8         0.875         9.50         #2-267


VQ Optional Accessories
Part Number Description
P/N: SM-651C         Digital controller with multiple set points
       P/N: SM-2153-MK         On-valve controller


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