Vari-Q Throttle Valve – 300 JIS Flange

MeiVac’s VQ throttle valve is the best downstream pressure control valve available on the market. The unique counter-rotating vane set provides for linear control across the entire operating range of the valve. In the open position the VQ throttle valve vanes offer little restriction in the pumping path during critical pump down operations. The counter rotated vane designs allow VQ flanges to be low profile, further minimizing conductance losses and pump stack heights. If linear control and process repeatability are important, then the MeiVac VQ throttle valve is a must for your thin film process application.

Vari-Q Throttle Valve – 300 JIS Flange
Part Number Description
                          P/N: VQ-300-JIS-U-PA         300 JIS aluminum flange, clear alodine coat, pneumatically actuated
                          P/N: VQ-300-JIS-H-PA         300 JIS aluminum flange, hard anodized coat, pneumatically actuated
                          P/N: VQ-300-JIS-SS-PA         300 JIS stainless steel flange, pneumatically actuated
                          P/N: VQ-300-JIS-U-SM         300 JIS aluminum flange, clear alodine coat, servomotor actuated
                          P/N: VQ-300-JIS-H-SM         300 JIS aluminum flange, hard anodized coat, servomotor actuated
                          P/N: VQ-300-JIS-SS-SM         300 JIS stainless steel flange,servomotor actuated


VQ Throttle Valve Dimensions -luna

Throttle valve VQ10
P/N: VQ-300-JIS-H-SM

VQ Throttle Valve Actuator Dimensions


VQ-300-JIS Dimensional Specifications
Dimension O.D. I.D T A N H D O-Ring
      mm  400  302  60  398  12  15  370  325mm ID x 6mm C/S


VQ Optional Accessories
Part Number Description
P/N: SM-651C         Digital controller with multiple set points
       P/N: SM-2153-MK         On-valve controller


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