Vari-Q Throttle Valve – 100 ISO Flange

MeiVac’s VQ throttle valve is the best downstream pressure control valve available on the market. The unique counter-rotating vane set provides for linear control across the entire operating range of the valve. In the open position the VQ throttle valve vanes offer little restriction in the pumping path during critical pump down operations. The counter rotated vane designs allow VQ flanges to be low profile, further minimizing conductance losses and pump stack heights. If linear control and process repeatability are important, then the MeiVac VQ throttle valve is a must for your thin film process application.

Vari-Q Throttle Valve – 100 ISO Flange
Part Number Description
                          P/N: VQ-100-ISO-U-PA         100 ISO aluminum flange, clear alodine coat, pneumatically actuated
                          P/N: VQ-100-ISO-H-PA         100 ISO aluminum flange, hard anodized coat, pneumatically actuated
                          P/N: VQ-100-ISO-SS-PA         100 ISO stainless steel flange, pneumatically actuated
                          P/N: VQ-100-ISO-U-SM         100 ISO aluminum flange, clear alodine coat, servomotor actuated
                          P/N: VQ-100-ISO-H-SM         100 ISO aluminum flange, hard anodized coat, servomotor actuated
                          P/N: VQ-100-ISO-SS-SM         100 ISO stainless steel flange,servomotor actuated


VQ Throttle Valve Dimensions -luna

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P/N: VQ-200-ISO-U-MK

VQ Throttle Valve Actuator Dimensions


VQ-100-ISO Dimensional Specifications
Dimension O.D. I.D T A N H D O-Ring
      mm  165  102  44  174  8  9  145  N/A


VQ Optional Accessories
Part Number Description
P/N: SM-651C         Digital controller with multiple set points
       P/N: SM-2153-MK         On-valve controller


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