UHV Linear e-Vap® Sources

e-Vap UHV linear pocket electron beam sources are the perfect choice for UHV coating tools. This source is extremely rugged with no in-vacuum bearings or sliding surfaces to bind or create particulates. Designed to withstand repeated high temperature bakeouts and extended periods under vacuum, this source offers a whole new level of reliability. Our proven advanced magnetic and high frequency sweep systems provide the best material utilization and stability in both rate and uniformity. Coupled with our extreme life filament system, the e-Vap UHV linear is the smart choice for MBE type applications.

e-Vap® UHV Linear Array Frame
Part Number
Standard Pocket Configurations
P/N: 0416-5004-4007         Linear array of four 7cc pockets electron beam evaporation source
P/N: 0416-5004-4015         Linear array of four 15cc pockets electron beam evaporation source
P/N: 0416-5004-4025         Linear array of four 25cc pockets electron beam evaporation source
P/N: 0416-5004-4040         Linear array of four 40cc pockets electron beam evaporation source


Product Features:
• Rugged industrial design
• No in-vacuum bearings
• Pneumatic positioning control
• Completely shielded to prevent shorting
• Easy to service
• Long filament life
UHV Linear e-Vap Source


e-Vap® UHV Linear Specifications
Parameter Specification
               Maximum Power 7cc to 15cc          6 kW
               Maximum Power 25cc to 40cc          12 kW
               Maximum Voltage          10 kVDC
               Maximum Current          1200 mA
               Maximum Filament Power          800 Watts
               Vacuum          2×10-11 Torr
               Water Flow          3.0 gpm @ 65 psi
               XY Sweep          0-200 Hz
               Emitter Assembly          Quick change plug-in emitter
               Bearing Assembly          No vacuum side bearings
               Bake Out Temperature          220C
               Indexing          Pneumatic actuation 80 psi


UHV Linear e-Vap Source 2 0416-5004-4040


e-Vap® UHV Linear Optional Accessories
Part Number Description
P/N: 7007-9800-0         6kW CVS Power Supply and Controller (Click for Datasheet)
P/N: 7020-0200-1         XY Programmable Sweep Controller (Click for Datasheet)


MeiVac purchased the entire MDC e-Vap thin film product line in 2012.
Contact our support team at support@meivac.com
for parts and service on all MDC e-Vap legacy products.

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