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THIN FILM EVAPORATION
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e-Vap®

Evaporation Sources & Accessories



MeiVac offers a complete line of evaporation products. From miniature research sources to 400cc industrial sources. We also have a complete line of power supplies, controls and accessories. Everything you need to set up your evaporation system from one source.

PRESSURE CONTROL
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Vari-Q

Throttle Valves & Accessories



MeiVac manufactures high-temperature resistive substrate heaters for heating samples or wafers to 950C with superior uniformity. 2 & 3″ sample heaters and 2,4,& 6″ wafer specific heaters are used for many deposition techniques.

MeiVac is a leading manufacturer of planar magnetron sputter cathodes. Noted for its simplicity, ease of use, and resulting high reliability, the MAK sputter source has been designed to present the smallest profile possible and deliver higher deposition rates than any comparable sputter sources. MeiVac thin film sputter deposition products are the right choice for your process with a full range of standard and custom configurations.

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