MeiVac’s Support team offers services that range from on-site installation and training to in-house product repair and refurbishment. Additionally, we design and manufacture upgrades that enhance the reliability and performance of our Products. Examples of what we have to offer include:

  • Uniformity Optimization Packages
  • Substrate Size Change Kits
  • Substrate Cooling Packages
  • RF Upgrades
  • 602 System Process Chamber additions
  • Control System Upgrades
  • Pumping Upgrades
  • SECS/GEM Tool Interface additions
  • Complete System cleanings and refurbishments
  • Sputter Source, Substrate Heater and Throttle Valve repair or reconditioning

Contact Us to discuss how we can help you enhance the performance of your Components and Systems.

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