Support

MeiVac’s Support team offers services that range from on-site installation and training to in-house product repair and refurbishment. Additionally, we design and manufacture upgrades that enhance the reliability and performance of our Products. Examples of what we have to offer include:

  • Uniformity Optimization Packages
  • Substrate Size Change Kits
  • Substrate Cooling Packages
  • RF Upgrades
  • 602 System Process Chamber additions
  • Control System Upgrades
  • Pumping Upgrades
  • SECS/GEM Tool Interface additions
  • Complete System cleanings and refurbishments
  • Sputter Source, Substrate Heater and Throttle Valve repair or reconditioning

Contact Us to discuss how we can help you enhance the performance of your Components and Systems.

Copyright MeiVac, Inc All Rights Reserved 2015