|
+1.408.362.1000 |
Support
MeiVac's Support team offers services that range from on-site installation and training to in-house product repair and refurbishment. Additionally, we design and manufacture upgrades that enhance the reliability and performance of our Products. Examples of what we have to offer include:
- Uniformity Optimization Packages
- Substrate Size Change Kits
- Substrate Cooling Packages
- RF Upgrades
- 602 System Process Chamber additions
- Control System Upgrades
- Pumping Upgrades
- SECS/GEM Tool Interface additions
- Complete System cleanings and refurbishments
- Sputter Source, Substrate Heater and Throttle Valve repair or reconditioning
