Support
MeiVac's Customer Support organization offers a variety of services meant to enhance the reliability and performance of your system. These include installation and start-up; spare parts, upgrades and retrofits; as well as service contracts and customer training.
MeiVac's system upgrades and retrofits are designed to keep our equipment in the field operating at peak performance levels. These upgrades, ranging from process improvements to automation enhancements to wafer size changes, are constantly being developed to enhance the performance of your system.
MeiVac offers training classes at either our factory or your facility. This training can range from basic vacuum to system operation/maintenance or process characterization. An effectively trained staff is another key to enhanced system reliability and functionality.
With our customers' processes and market requirements constantly changing, this type of Customer Support is just another example of the VALUE ADDED that results from a partnership with MeiVac.
Examples of upgrades and retrofits from MeiVac include:
- Substrate Size Change Kits
- Increased chamber cooling to enable higher power/higher deposition rate processing
- Helium Backside Cooling
- Pump Upgrades
- RF Upgrades related to Noise, Power and Control
- 602 Series system conversions from single to multi-chamber
- Control system upgrades to Windows® XP
- SECS/GEM interfacing to fab-wide MES
- System customization through hardware, software and/or process upgrades
