Batch RF Diode
Collaborations with customers deliver optimum solutions
Having acquired the Comptech family of 2460 & 2480 RF Diode sputtering tools several years ago, continues to enhance and expand the capabilities of the these workhorses in the Magnetic Storage Industry. In addition to offering new systems, MeiVac will retrofit and/or upgrade existing systems to meet customers evolving process requirements and specifications. Over 200 of its 2460 & 2480 systems are in use worldwide.
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Features:
- Target/substrate carrier size: 17”x17” (2460) or 20”X20” (2480)
- Wafer size, 75 mm – 200 mm, per customer specification.
- Batch sizes vary with wafer size and customer uniformity requirements.
- Pump options; Single Cryopump, Double Cryopump or Turbo/cryogenic water pump combination, with or without second cryo pump.
- RF bias for stress reduction, improved uniformity and step coverage.
- Helium gas backside cooling or InGa liquid metal cooling interface.
- Intuitive, Icon-driven, point-and-click Graphical User Interface (GUI) for ease of operation.
- Advanced SECS/GEM interface for recipe management and process monitoring.