|
+1.408.362.1000 |
Substrate Heaters
MeiVac resistance substrate heaters are designed to withstand oxygen and other reactive gases at maximum temperature and high pressures. The patented design with field proven power connections, provide long life and low maintenance. Use of nickel-based metals allows the heaters to support high temperatures and a variety of applications for contact and non-contact mounting depending on the process.
MeiVac resistance substrate heaters have been used in sputtering, laser ablation, ion beam deposition, ECR, MOCVD, and many other general laboratory heating applications. With over 1000 units installed worldwide, this highly reliable substrate heater is recognized as a leading product for high temperature substrate processing.
Currently, MeiVac offers the following substrate heaters and accessories:
