Substrate Heaters
MeiVac resistive substrate heaters are designed to withstand oxygen and other reactive gases at maximum temperature and high pressures. The patented design process with field proven power connections, provide long life and low maintenance. Utilizing nickel-based metals allow the heaters to support high temperatures and a variety of applications for contact and non-contact mounting depending on the process.
MeiVac resistive substrate heaters have been used in sputtering, laser ablation, ion beam deposition, ECR, MOCVD, and many other general laboratories heating applications. With over 1000 units installed worldwide, the highly reliable substrate heater has become recognized as a leading product for high temperature substrate processing.
Available Substrate Heaters
Currently, MeiVac offers the following substrate heaters:
PRODUCT |
SPECIFICATIONS |
| 2" Substrate Heater | Specifications |
| 3" Substrate Heater | Specifications |
| 4" Substrate Heater | Specifications |
| 6" Substrate Heater | Specifications |
| Substrate Heater Accessories | click for info |
