Process Solutions
MeiVac doesn't just sell systems, we sell systems that work when delivered.
And those systems improve over time. Many of the improvements come from MeiVac's Applications team that is not only working to improve the process performance of MeiVac's standard systems, but also developing new processes that can expand a tool's capabilities. These improvements could involve higher deposition rates, better film quality such as thickness uniformity, stoichiometry control and repeatability, etc. or new materials and/or processing methods.
These solutions are not just limited to MeiVac's standard systems. Our Applications team will work with customers to help find ways to optimize processes on their existing tools or design new tools that can meet emerging needs.
Whether you're planning to build a 24/7 production fab or early in your development cycle, MeiVac looks forward to the opportunity to work with your researchers and engineers to maximize the process performance of a new or an existing tool.
Metrology Tools |
|
In-House Capability |
Off-Site Capability |
| Nanospec Thin Film Measurement System | RBS |
| Filmetric Thin Film Analyzer | XRR |
| Woollam Ellipsometer | Tencor Flexus |
| Optical Microscope | |
| Hitachi SEM with EDS (Energy Dispersive Spectroscopy) | |
| DekTak-3 | |
