Latest News from MeiVac
March 16, 2009 - MeiVac Adds WEST-TECH in Ohio and Western Pennsylvania
>> Read more...
December 10, 2008 - MeiVac announces High Uniformity Processes 602 Cluster Tool
>> Read more...
August 12, 2008 - MeiVac Celebrates its 15th Anniversary.
>> Read more...
We Support Our Products!
The MeiVac team is committed to our customers and our products. We stand behind each of our systems and components and are eager to work with you to engineer an optimum solution for your next precision manufacturing job.
Advanced High-Precision Thin Film Sputtering Systems
MeiVac produces a number of standard and customized sputtering systems and sub-systems that serve high volume production and specialized research and development market needs for a wide variety of materials.
Along with its popular modular Series 602 Cluster System that delivers single wafer processing in one, two or three chamber configurations, MeiVac also produces its industry-standard RF diode batch dielectric sputtering tool, the 2480. In addition, MeiVac supports its customers by working with them to arrive at custom engineered system and sub-system solutions that are optimized to meet their specific manufacturing or development needs.
No matter what your requirements, talk with MeiVac to determine which type of system and process is ideal for you. We can help!
Standard Systems
Al2O3 sputter deposition tools for 24/7 Hard Disk Drive Thin Film Head fabrication
- The fully automated, single wafer 602 Series and the semi-automated multi-wafer 2480
- Both systems can process round or square substrates in sizes up to 200mm in diameter
- Both systems can employ RF powered sputter sources
- The 602 can also use DC powered sputter sources for reactive and non-reactive processes
- Reactive and non-reactive deposition processes
- >300 systems installed worldwide
- In development: Innovative, precision, hi-rate reactive deposition tool for Al2O3 and other materials
Custom Systems & Sub-systems
These include systems or complex sub-systems, most of which MeiVac designs, fabricates, assembles and tests to customer specification. Markets served include data storage, semiconductor, photonics, solar, telecom and government/R&D. Quantities can range from single units to JIT manufactured and tested sub-assemblies in volumes of 10, 20 or more per month. Examples of such products include:
- Automated, high speed (900 disk/hr) gold coat sputter module for a CD production line
- Multi-planetary, insitu multi-layer e-beam deposition tool for building precision photonics devices
- 5 source (RF & DC) deposition tool with planetaries capable of handling multiple substrates, totaling 2,000lb. Application confidential.
- Multi-chamber production in-line cell phone battery bake-out system.
- A complex servo spindle assembly used by a major semiconductor OEM in many of their tools.
- An integrated process monitor assembly used in solar device manufacturing tools.
Process Solutions
As researchers and engineers search for new processes to address a variety of emerging needs, they often need to find new tools or modify existing tools to produce them. MeiVac has 30+ years of experience developing advanced thin film deposition systems and processes to meet customers' specific needs, whether they are for low volume pilot line or development, or 24/7 production. We look forward to collaborating with your scientists and engineers to help find innovative, cost effective solutions that will meet your needs.
