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Advanced High-Precision Thin Film Sputtering Systems
Standard Systems
- Al2O3 sputter deposition tools for 24/7 Hard Disk Drive Thin Film Head fabrication
- Fully automated single wafer 602 Series (shown here)
- Semi-automated multi-wafer 2480
- >300 systems installed worldwide
- In development, and innovative, precision, hi-rate reactive deposition tool for Al2O3 and other materials
Process Solutions
- A process development team to help customers develop new processes or optimize existing processes for specific applications.
