sitemap
Throttle Valves Sputter Sources Substrate Heaters Power Supplies Custom Assemblies Targets Integrators

Power Supplies

MeiVac offers a variety of DC power supplies and RF generators to meet most sputter processing needs.

Available DC Power Supplies

Advanced Energy MDX Series Generators

  • Available in 500W / 1kW / 1.5kW
  • Higher Watt Units Available Upon Request

MDX500

MDX 1kW and 1.5kW

Advanced Energy Pinnacle Plus Generators

  • Available in 5kW or 10kW
  • Pulsed DC Power

Pinnacle Plus

Available RF Power Supplies

13.56 MHz RF Generator

  • 300W / 600W / 1000W
  • CE Marked
  • Air Cooled Rack
  • RS-232 / 422 / 485
  • Dual Power Range
  • RF/DC Voltage Control
  • Master / Slave Operation

SU-R301 and SU-R601

Automatic and Manual Tuning Networks

  • Generator Forward Power, Reflected Power, and DC Bias Voltage Displayed
  • Analog or RS-232 Serial Interface
  • Low Losses / Wide Tuning Range
  • Single Point System Integration
  • Agile Frequency Tuning
  • CE Marked
  • Conservatively Rated
  • Programmable Presets
  • DC Probe Standard
  • Optional Pulse Detector
  • Air and Vacuum Variable Capacitors

AT-3 and AT-6