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Power Supplies

MeiVac offers a variety of DC power supplies and RF generators to meet most sputter processing needs.

Available DC Power Supplies

Power Mag Technology DC Power Supply

  • 1000W or 1500W DC Power
  • Arc suppression circuitry
  • Regulate in power, voltage, or current modes
  • Universal input voltage

MAXIM 1500









Advanced Energy DC Power Supplies



  • Standard MDX Series DC Power
  • Available in 500W/ 1KW / 1.5KW




  • Available in 5KW or 10 KW
  • Pulsed DC Power



MDX500
MDX 1kW and 1.5kW

Pinnacle Plus

Available RF Generators

13.56 MHz RF Generator

  • 300W / 600W / 1000W
  • CE Marked
  • Air Cooled Rack
  • RS-232 / 422 / 485
  • Dual Power Range
  • RF/DC Voltage Control
  • Master / Slave Operation

SU-R301 and SU-R601

Automatic and Manual Tuning Networks

  • Generator Forward Power, Reflected Power, and DC Bias Voltage Displayed
  • Analog or RS-232 Serial Interface
  • Low Losses / Wide Tuning Range
  • Single Point System Integration
  • Agile Frequency Tuning
  • CE Marked
  • Conservatively Rated
  • Programmable Presets
  • DC Probe Standard
  • Optional Pulse Detector
  • Air and Vacuum Variable Capacitors

AT-3 and AT-6