6" Substrate Heater
Product Configurations
Part Number |
Wafer Size |
950°C Max. |
TC Position |
DC/RF Bias |
Oxygen Compatible |
UHV Compatible |
SU-600IH |
6" | X | 2 | Yes | Yes | Yes |
Product Specifications
Part Number |
SU-600IH |
Temp. Uniformity |
± 2% |
Temp. Repeatability |
13°C |
Ramp Time to 600oC |
8 min. |
Ramp Time to 950oC |
30 min. |
Cool-down Time |
4 hours |
Max Current |
14 amps* |
Max Voltage |
135 volts* |
Heater Resistance |
10 ohms |
Power Supply |
AC/DC |
| *115V, 12A will reach 875°C
(All of the above specifications were taken at 1 atm pressure) |
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