4" Substrate Heater
Product Configurations
Part Number |
Wafer Size |
950°C Max. |
TC Position |
DC/RF Bias |
Oxygen Compatible |
UHV Compatible |
SU-400IH |
4" | X | 2 | Yes | Yes | Yes |
Product Specifications
Part Number |
SU-400IH |
Temp. Uniformity |
± 2% |
Temp. Repeatability |
13oC |
Ramp Time to 600oC |
6 min. |
Ramp Time to 950oC |
22 min. |
Cool-down Time |
3 hours |
Max Current |
14 amps |
Max Voltage |
85 volts |
Heater Resistance |
6 ohms |
Power Supply |
AC/DC |
| (All of the above specifications were taken at 1 atm pressure) | |
