3" Substrate Heater
Product Configurations
Part Number |
Wafer Size |
950°C Max. |
TC Position |
DC/RF Bias |
Oxygen Compatible |
UHV Compatible |
SU-300HH |
2" | X | 1 | Yes | Yes | Yes |
Product Specifications
Part Number |
SU-300HH |
Temp. Uniformity |
± 1% |
Temp. Repeatability |
12oC |
Ramp Time to 600oC |
5 min. |
Ramp Time to 950oC |
13 min. |
Cool-down Time (to |
45 min. |
Max Current |
9 amps |
Max Voltage |
85 volts |
Heater Resistance |
10 ohms |
Power Supply |
AC/DC |
| (All of the above specifications were taken at 1 atm pressure) | |
