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+1.408.362.1000 |
2" Substrate Heater
Product Configurations
Part Number |
Wafer Size |
600°C Max. |
950°C Max. |
TC Position |
DC/RF Bias |
Oxygen Compatible |
UHV Compatible |
SU-200HH |
1" | X | 1 | Yes | Yes | Yes | |
SU-200IH |
2" | X | 1 | Yes | Yes | Yes |
Product Specifications
Parameter |
SU-200HH |
SU-200IH |
Temp. Uniformity |
+1% | +1% |
Temp. Repeatability |
12oC |
12oC |
Ramp Time to 60 0oC |
4 min. | 4 min. |
Ramp Time to 950oC |
12 min. | 12 min. |
Cool-down Time (to |
35 min. | 35 min. |
Max Current |
10 amps | 10 amps |
Max Voltage |
45 volts | 45 volts |
Heater Resistance |
5 ohms | 5 ohms |
Power Supply |
AC/DC | AC/DC |
| (All of the above specifications were taken at 1 atm pressure) | ||
