Process Solutions

Whether you need a tool for a 24/7 production fab or are still in the development phase, MeiVac will work with your researchers and engineers to maximize the process performance of a new or existing tool.

R&D and Process Improvements
  • Process optimization to meet your specific needs
    • Higher deposition rates>
    • Film thickness uniformity optimization
    • Film stoichiometry uniformity control and repeatability
  • Process development to address new Applications
    • New materials
    • New sources and/or process chamber configurations
  • Process development is not just limited to MeiVac’s standard systems. Our Process team works with customers to:
    • Help optimize processes on their existing tools
    • Design new tools that can meet their emerging requirements

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Metrology Tools
In-House Capability Off-Site Capability>
Nanospec Thin Film Measurement System RBS
Filmetric Thin Film Analyzer XRR
Woollam Ellipsometer Tencor Flexus
Hitachi SEM with EDS (Energy Dispersive Spectroscopy)
DekTak Profilometer
Metricon Prism Coupler
Optical Microscope

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