Power Supplies

MeiVac offers a variety of DC power supplies and RF generators to meet most sputter processing needs.

Available DC Power Supplies

PRODUCT

PART NUMBER
(Click for more information)

Power Mag Technology DC Power Supply

  • 1000W or 1500W DC Power
  • Arc suppression circuitry
  • Regulate in power, voltage, or current modes
  • Universal input voltage

MAXIM 1500

MAXIM DC POWER SUPPLY

Advanced Energy DC Power Supplies

  • Standard MDX Series DC Power
  • Available in 500W/ 1KW / 1.5KW
  • Available in 5KW or 10 KW
  • Pulsed DC Power

power_supply_mdx500_smallMDX500
MDX 1kW and 1.5kW

power_supply_pp_smallPinnacle Plus

Available RF Generators

PRODUCT

PART NUMBER
(Click for more information)

13.56 MHz RF Generator

  • 300W / 600W / 1000W
  • CE Marked
  • Air Cooled Rack
  • RS-232 / 422 / 485
  • Dual Power Range
  • RF/DC Voltage Control
  • Master / Slave Operation

SU-R301 and SU-R601

SU-R601 13.56 MHZ RF GENERATOR

Automatic and Manual Tuning Networks

  • Generator Forward Power, Reflected Power, and DC Bias Voltage Displayed
  • Analog or RS-232 Serial Interface
  • Low Losses / Wide Tuning Range
  • Single Point System Integration
  • Agile Frequency Tuning
  • CE Marked
  • Conservatively Rated
  • Programmable Presets
  • DC Probe Standard
  • Optional Pulse Detector
  • Air and Vacuum Variable Capacitors

AT-3 and AT-6

RF MATCHING NETWORK

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