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December 10, 2008 - MeiVac announces High Uniformity Processes 602 Cluster Tool
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PRESS RELEASE
MeiVac announces High Uniformity Processes on the 602 Cluster Tool
San Jose, CA - December 10, 2008 - MeiVac, Inc., a leading provider of alumina sputtering systems used in the manufacture of Thin Film Heads (TFH) for Hard Disk Drives (HDD), today announced that several major TFH manufacturers are evaluating process results on wafers deposited in the latest version of MeiVac's 602 cluster platform. Findings include significantly improved uniformity (~0.5%) with a CMP friendly concentric deposition pattern. The improved uniform grain structure control on planar and side wall surfaces results in improved wet etch uniformities and addresses many seam issues that otherwise decrease yields. These improved results are achieved in both new 602 systems as well as upgrades to existing 602 systems scheduled for availability in Spring 2009.
"Our development is focused on processes that are compatible with other customer production requirements such as CMP," said Jim Ritter, CTO and Process Development Manager at MeiVac. "With 200 mm wafers in mind, we have improved overall thickness uniformity while creating processes that control grain structure in material deposited on planar, trench and side wall surfaces. These improvements significantly reduce major wet etch and CMP film structure yield problems being experienced with increasing frequency in existing alumina deposition processes."
About MeiVac, Inc.
MeiVac is an industry leader in providing high-quality thin film manufacturing systems, components and process solutions. It is a multi-faceted supplier of standard and specialty vacuum processing systems and components used in multiple high technology production and development applications. MeiVac's served markets include data storage, photonics, government R&D, and telecom, among others. MeiVac is headquartered in San Jose, California. More information about MeiVac and its products can be found at www.meivac.com.
Media Contact
Jim Golden
MeiVac, Inc.
pr@meivac.com
1-408-362-1000
