e-Vap® E-beam Evaporation Sources

e-Vap® Evaporation Sources
e-Vap Miniature Source Model

Click for Specifications

  • Compact design
  • Water cooled
  • 2cc fixed pocket
  • Fits onto a 2.75″ CF flange
e-Vap Mighty Source-cropped

Click for Specifications

  • Compact design
  • Uniquely small footprint
  •  2cc x 4-pocket configuration
  • Water cooled
e-Vap Large Fixed Pocket Source

Click for Specifications

  • Modular design
  • Water Cooled
  • 7 to 100cc Fixed pocket
e-Vap Large Rotary Pocket Evaporation Source

Click for Specifications

  • Modular design
  • Water cooled
  • 7 to 30cc x 4-pocket configuration
  • 7 to 12cc x 6-pocket configuration
  • 150cc carousel pocket
e-Vap frame 6 024-cropped

Click for Specifications

  • Water cooled
  • 100cc x 3 pocket configuration
  • 40 to 75cc x 4 pocket configuration
  • 25 to 40cc x 6 pocket configuration
  • 400cc carousel pocket
evap flangemount evaporation source

Click for Design Examples

  • Custom specified flange sizes
  • Vertical & horizontal configurations
  • Integrated electrical, water, and motion feedthroughs
  • Shutter options available
UHV Linear e-Vap Source

Click for Specifications

  • 7 to 40cc x 4 pocket
  • No in vacuum bearings
  • Bakeable to 220 C

MeiVac purchased the entire MDC e-Vap thin film product line in 2012.
Contact our support team at support@meivac.com
for parts and service on all MDC e-Vap legacy products.

Copyright MeiVac, Inc All Rights Reserved 2015