e-Vap® 3kW Evaporation Sources


e-Vap® 3kW electron beam sources are the ideal choice for research systems. The crucible size is carefully matched to the 3kW power supply to allow temperatures high enough to evaporate virtually any materials including metals, oxides, and even refractory metals. The small footprint makes them easy to integrate into just about any chamber.

 

e-Vap® 3kW Miniature Source

P/N: 0414-0004-1002  Fixed pocket 2cc 3kW electron beam evaporation source. Flange mounted on 2.75” diameter CF type flange with HV and Water feedthroughs included. Fits through standard 1.38” ID port. UHV compatible to 2x10E-11 Torr.

e-Vap Miniature Source cropped

e-Vap® 3kW Mighty Source

P/N: 0408-0004-4002  4 pocket rotary 2cc 3kW electron beam evaporation source. Small footprint just 2.4” H x 4.1” L x 2.8” W. High Vacuum compatible to 2x10E-8 Torr.
P/N: 0408-0004-1007  Fixed pocket 7cc 3kW electron beam evaporation source. Small footprint just 2.4” H x 4.1” L x 2.8” W. High Vacuum compatible to 2x10E-8 Torr.

e-Vap Mighty Source cropped

e-Vap® 3kW Specifications

          Maximum Power  3 kW
          Operating Voltage  Approximate -5000 VDC
          Beam Current  Zero to 600 mA
          Water Flow  0.62 gpm@ 65 psi
          XY sweep  Mighty Source only. Up to 1 ampere 0=50Hz


MeiVac purchased the entire MDC e-Vap thin film product line in 2012.
Contact our support team at support@meivac.com
for parts and service on all MDC e-Vap legacy products.

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