Documentation
PRODUCT |
Document |
SYSTEMS DOCUMENTATION |
|
| MeiVac 602 Series Cluster Tool | MeiVac 602 Series Brochure |
| MeiVac 2480 RF Batch Dielectric Tool | MeiVac 2460/2480 Brochure |
COMPONENT DOCUMENTATION |
|
| MeiVac Throttle Valves | MeiVac Throttle Valves Brochure |
| MeiVac Throttle Valves | MeiVac Throttle Valves Owners Manual |
| MeiVac Throttle Valve Controllers | Manual for SM-2153-MK Rev D |
| MeiVac Throttle Valve Controllers | Manual for SM-2153-MK Rev E |
| MeiVac Throttle Valve Controllers | Manual for SM-651C |
| MeiVac MAK Sputter Sources and Substrate Heaters | MeiVac MAK Sputter Sources and Substrate Heaters Brochure |
| MeiVac MAK Sputter Sources | MAK Sputter Source Owners Manual |
| MeiVac Substrate Heater | 2" and 3" Substrate Heater Manual |
| MeiVac Substrate Heater | 4" and 6" Substrate Heater Manual |
TARGET SPECIFICATIONS |
|
| 1.3" MAK Target | 1.3" Target Specification |
| 2" MAK Target | 2" Target Specification |
| 3" MAK Target | 3" Target Specification |
| 4" MAK Target | 4" Target Specification |
| 6" MAK Target | 6" Target Specification |
COMMERCIAL DOCUMENTATION |
|
| MeiVac Terms and Conditions | MeiVac Terms and Conditions of Sale document |
