Deposition Rate Monitor and Controller

Deposition rate monitor and controller allows real time measurement of film thickness. Our monitors offer shutter control and can be used to stop a film at a desired thickness. Our rate controllers can be integrated with our sweep, indexer, shutter and power supply to provide a completed automated process solution.

Thin Film Monitors, Controllers, and Sensor Packages
Part Number Description
P/N: 7020-0400-0  Thin film rate monitor
P/N: 7020-0500-0  Thin film rate controller
P/N: 0495-0272-0  Low profile crystal sensor package, 2.75″ CF type flange with oscillator, cables and 10 pkg of gold 6mHz crystals
P/N: 0495-0340-0  Low profile crystal sensor package, 1″ bolt type flange with oscillator, cables and 10 pkg of gold 6mHz crystals
P/N: 0495-0540-0  Bakeable crystal sensor package, 2.75″ CF type flange with oscillator, cables and 10 pkg of gold 6mHz crystals


deposition controller

Deposition Controller

Thin Film Monitor and Controller Specifications
Parameter Specification
              Input power    110 VAC / 220 VAC
              Rack mount    3U x 1/2 rack
              Crystal head    Two channel 6MHz


MeiVac purchased the entire MDC e-Vap thin film product line in 2012.
Contact our support team at support@meivac.com
for parts and service on all MDC e-Vap legacy products.

Copyright MeiVac, Inc All Rights Reserved 2015