DC & RF Power Supplies for MAK Sputter Sources

e-Vap® CVS power supplies are the perfect solution for modern coating systems. The digital control system allows user control of power level and arc management. MeiVac offers 3 standard power configurations; 3kW, 6kW and 12kW. These can be programmed to match any electron beam source to perfection. Power supplies come with both Ethernet and a 50 pin digital I/O with access to all key control and monitoring features. A standard graphic user interface (GUI) is also included. All CVS supplies include our 1U filament drive unit, remote mount filament transformer and complete installation / cable kit. Multi-channel kits are also available to control up to 3 ebeam sources per power supply.

DC & RF Power Supplies for MAK Sputter Sources
MAXIM DC POWER SUPPLY

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  • Superior arc suppression circuitry
  • Universal input voltage
  • Regulation in power, voltage, or current modes
MAXIM DC POWER SUPPLY

Click for Specifications

  • Superior arc suppression circuitry
  • Universal input voltage
  • Regulation in power, voltage, or current modes
MAXIM DC POWER SUPPLY

Click for Specifications

  • Superior arc suppression circuitry
  • Universal input voltage
  • Regulation in power, voltage, or current modes
SU-R601 13.56 MHZ RF GENERATOR

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  • Air Cooled
  • RS-232 / 422 / 485
  • CE Marked
  • Master / Slave Operation
SU-R601 13.56 MHZ RF GENERATOR

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  • Air Cooled
  • RS-232 / 422 / 485
  • CE Marked
  • Master / Slave Operation

MeiVac acquired the US Inc thin film product line in 2006.
The product lines included MAK and US GUN II sputter sources,
HTR substrate heaters, and associated power supplies for these components.
Contact our support team at support@meivac.com
for parts and service on all MDC e-Vap legacy products.

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