Customer Support

Beyond international service, installation, system qualification, and spare parts capabilities MeiVac Customer Support offers upgrades and retrofits toNew 2480 screen jpg our equipment. Vacuum and process improvements, wafer size changes and yield enhancements are in constant development within our group. With processes and market requirements changing almost daily, this service is one example of the VALUE ADDED support required for your success.

MeiVac Customer Support offers training classes at either our factory or your facility. This training can range from basic vacuum and system operation/maintenance to process development characterization. System/process reliability and functionality go hand in hand with productivity, yield and profitability. To further enhance these necessities we offer service contracts to provide periodic or on-call support from our experienced staff.

  • Field Service, Rates and service calls, Spare Parts
  • Retrofits, Upgrades, Modifications
  • Size Change Kits
  • Helium Backside cooling
  • Pump upgrades
  • RF upgrades, Noise, Power, Control
  • System conversions e.g. 620 to 602 single or multi-chamber
  • Custom hardware/software/process development
  • Service Contracts
  • Training
  • Manuals & drawings
  • Process Support