602 Cluster Tool
Fully automated single wafer deposition for precise process control
- MeiVac’s line of single wafer cluster tools, expands its capability to address a broader array of Thin Film Head dielectric film requirements.
- In addition to offering new systems, MeiVac will retrofit and/or upgrade existing systems to maintain customers advancing process requirements and specifications.
- Over 35 in worldwide production
- 11 years of continuous Manufacturing and Worldwide Support.
- A Standard of the Magnetic Storage Industry.
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Features:
- Single, Double or Triple chamber configurations
- RF Diode, RF Planar Magnetron or Pulsed DC Planar Magnetron
- Helium Backside wafer cooling
- Accommodates wafer sizes up to 200 mm wafers
- Pump options; Single Cryopump or Turbo/ cryogenic water pump
- RF bias for Stress reduction, improved uniformity and step coverage
- On-going process and hardware development extends life with upgrades or complete retrofit of wafer size, pumping, deposition power or process control systems.
- Intuitive, Icon-driven, point-and-click Graphical User Interface (GUI) for ease of operation.
- Advanced SECS/GEM interface for recipe management and process monitoring.